INTERMITTENT COATING METHOD FOR THIN FILM

摘要

A method for intermittently applying thin-film coatings is realized, by which a coating of extremely thin film reduced to 20 µm or less in thickness is deposited intermittently with high productivity and at the same time, the trailing coating edge of the thin film is formed in a highly accurate shape having good linearity. This is achieved as follows. A band-shaped substrate (1) traveling in one direction is kept looped over a stationary reference roller (4) and a movable actuation roller (7), and is brought into contact with an application roller (19) which carries a coating agent (18) on its circumferential surface and rotates in a direction opposite to the direction of travel of the substrate (1). The actuation roller (7) is moved to come into or out of contact with the substrate (1) with a predetermined timing. A tension roller (8) is also controllably moved to come into or out of contact with the substrate (1), following the actuation roller (7) coming into or out of contact with the substrate (1), so that the tension applied to the substrate (1) is kept constant all the time.