OPTICAL DISPLACEMENT METER, OPTICAL DISPLACEMENT MEASUREMENT METHOD, OPTICAL DISPLACEMENT MEASUREMENT PROGRAM, COMPUTER-READABLE RECORDING MEDIUM, AND APPARATUS WITH PROGRAM RECORDED THEREON

摘要

PROBLEM TO BE SOLVED: To provide an optical displacement meter suitable for minutely analyzing the process of error occurrence. SOLUTION: The optical displacement meter includes a light reception level control means, an alarm detection means, and a memory part. The control means is used for feedback-controlling at least any one parameter out of operation amounts including the light emission amount of a light projection part and the gain of an amplifier so that the distribution of respective peaks in a first direction of a received light signal obtained by the amplifier becomes within a prescribed range. The detection means is used for outputting an alarm signal if the operation amounts controlled by the control means or a received light amount exceeds a prescribed value. The memory part is used for therein storing a profile shape and/or a trend graph together with obtained time information and further recording a period during which the detection means has outputted the alarm signal. The detection means is structured so that the period during which the alarm signal has been output by the detection means can be displayed on the trend graph in a trend-graph display area of a display part. COPYRIGHT: (C)2008,JPO&INPIT