| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polisher and a polishing method, reducing a variation in polishing characteristics due to the uncertainty of fixing of abrasive grains by changing polishing conditions according to the measured results of the amount of the abrasive grains each time a predetermined quantity of sheets are polished. <P>SOLUTION: Since the measurement of the fixing distribution of abrasive grains by a polishing abrasive grain fixing amount measuring part 62, the calculation of the polishing conditions by a polishing condition calculation and setting part 53, and the feedback of the polishing conditions to a polishing unit are performed each time a predetermined quantity of sheets are polished, the polishing characteristics can be matched with high accuracy with a theoretical ones expressed by the Preston formula by reducing a variation in polishing characteristics which is produced during the polishing using abrasive grains due to the uncertainty of supply of the abrasive grains when the polishing is performed repeatedly. <P>COPYRIGHT: (C)2010,JPO&INPIT |
