| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a display device that can effectively remove residual materials occurring under exfoliation of a glass substrate and adhering to a resin layer.SOLUTION: There is prepared a structure including a first resin layer 11 and a second resin layer 21 sandwiching a self-luminous element layer 50 therebetween, a first stopper layer 14, a first resin sacrificial layer 105 and a first glass substrate 101 which are laminated on the first resin layer 11 on the opposite side to the self-luminous element layer 50, and a second glass substrate 202 which is laminated on the second resin layer 21 on the opposite side to the self-luminous element layer 50. By irradiating the first glass substrate 101 with a laser beam, the first glass substrate 101 is peeled off from the first resin sacrificial layer 102. By a chemical reaction using gas, the first resin sacrificial layer 102 is decomposed. The first stopper layer 24 has resistance to chemical reactions, and the first resin sacrificial layer 102 is removed in the step of decomposing the first resin sacrificial layer 102 while leaving the first stopper layer 14.SELECTED DRAWING: Figure 2 |
