| 摘要 |
Provided is a pushing device for a test handler, the device comprising: a pusher for pushing a semiconductor element so as to electrically connect the semiconductor element and a tester; a mounting plate on which the pusher is mounted; an elastic member for elastically supporting the pusher on the mounting plate; a cooling module for supplying cold air to a contact part of the pusher, the contact part being a part at which the pusher comes into contact with the semiconductor element positioned at the front; and a driving source for forwardly pushing or backwardly pulling the mounting plate so as to allow the pusher to push or release the semiconductor element, wherein the pusher has a cooling space therein in order to send, to the contact part, the cold air supplied by the cooling module, and the cooling space is opened rearwards such that the cold air of a refrigerant passes through a heat pipe or directly affects the contact part of the pusher, thereby quickly removing the heat generated from the semiconductor element, and improving the efficiency of heat removal since the cold air is not taken away by the other components. |
