| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for inspecting existence of a middle layer in a multilayered transparent body in a short time in a noncontact way. SOLUTION: A laser displacement sensor 31 is used, for irradiating laser light toward the surface of a preform 10 which is the multilayered transparent body, detecting reflected light A, B, C in the prescribed direction from the surface 10A, the middle layer 19 and the back 10B of the multilayered transparent body, and outputting position signals corresponding to incident positions. The laser displacement sensor 31 is arranged so that signal components (a), (b), (c) showing the reflected light A, B, C from the surface 10A, the middle layer 19 and the back 10B of the preform 10 appear discriminably in the separated state in the position signals, and data for showing an inspection result including at least determination of existence of the middle layer 19 are generated based on existence and the positions of the signal components (a), (b), (c) appearing in the position signals outputted from the laser displacement sensor 31. COPYRIGHT: (C)2005,JPO&NCIPI
|
