Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same

摘要

An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.

主权项

1. An access arbitration module for a passive component within a semiconductor fabrication facility, comprising:
a plurality of active component communication ports for communicating with a plurality of active components, wherein each of the plurality of active components is defined to handle one or more containers within the semiconductor fabrication facility, wherein each of the one or more containers is defined to hold at least one workpiece; a passive component communication port for communicating with a passive component, the passive component defined to receive at least one container from any of the plurality of active components; and switching circuitry defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, the switching circuitry defined to direct transmission of access communication protocol signals from one of the plurality of active component communication ports to the passive component communication port at a given time while blocking transmission of access communication protocol signals from others of the plurality of active component communication ports at the given time, such that one of the plurality of active components is allowed to access the passive component at the given time.