FILM FORMING DEVICE AND METHOD

摘要

A film forming device for forming an organic material film on a target position of a substrate, comprising a gas conveying mechanism (101) and a gas injection mechanism (102), wherein the gas conveying mechanism (101) is used for conveying a mixed gas of vapour of an organic material and an inert gas to the gas injection mechanism (102); the gas injection mechanism (102) is used for injecting the mixed gas conveyed by the gas conveying mechanism (101) to the target position on the substrate. Also a method for conveying the mixed gas of vapour of an organic material and the inert gas to the target position on the substrate using the film forming device.