| 摘要 |
<p>A microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate (205), a plurality of actuation electrodes (230) mounted on the substrate, a plurality of bottom electrodes (210) mounted on the substrate, a capacitor (cl, c2, c3) having subcomponents e.g. dielectric layers (330), mounted on the two or more bottom electrodes (210) and a top bendable electrode (215) mounted on the substrate. The top electrode (215) collapses a first magnitude towards the actuation electrodes (230) whenever a first voltage is applied to one or more of the actuation electrodes (230) and collapses a second magnitude towards the actuation electrodes (230) whenever a second voltage is applied to the actuation electrodes (230).</p> |
