| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hydrogen refining filter showing superior hydrogen permeation efficiency in producing hydrogen, and a simple manufacturing method thereof. <P>SOLUTION: The hydrogen refining filter is provided with a front face Pd alloy membrane disposed to cover hole parts on one face of a porous support body, and a rear face Pd alloy membrane disposed on the front face Pd alloy membrane located on the other face of the porous support body including inner wall faces of the hole parts and in the hole parts, using a laminated part of the front face Pd alloy membrane and rear face Pd alloy membrane as a hydrogen permeation membrane. The porous support body is manufactured by drilling the multiple hole parts by an etching process, a film resist is stuck to one face of the porous support body by an electroless plating process; the rear face Pd alloy membrane is formed on the porous support body including the inner wall faces of the hole parts and the film resist located in the hole parts, by the electroless plating process from the other face side of the porous support body; the front face Pd alloy membrane is formed on the exposed face by eliminating the film resist by electroplating, to manufacture the hydrogen refining filter. <P>COPYRIGHT: (C)2008,JPO&INPIT |
