| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a three-dimensional structure having perfect projecting corners by etching. SOLUTION: The method for obtaining a desired structure includes a process for separating a substrate in two structures (502-504 and 505) so that the exterior corners are formed by the crossing (506) of a first structure and a second structure on the substrate (501), a process for forming an etching mask on a surface and the substrate of the first structure formed by etching, a process for opening a window to define the second structure in the etching mask on the substrate, and a process for forming the second structure (505) by etching. COPYRIGHT: (C)2005,JPO&NCIPI
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