| 摘要 |
PURPOSE: A wafer transfer is provided to remove a sensing error and detect a loading state of a wafer by installing a wafer detection sensor using a contact inverter sensor on a fork. CONSTITUTION: A wafer transfer includes a wafer transfer body, one or more fork, and one or more wafer detection sensors. The forks(204) are adhered to the wafer transfer body(201). A semiconductor wafer is loaded on the forks. The wafer detection sensors(206a,206b,206c) are formed on semiconductor loading parts of the forks in order to detect a loading state of the semiconductor wafer. The wafer detection sensors are formed with contact inverter sensors.
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