| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a microelectromechanical system (MEMS) valve device having advantages of quick operation, large valve force and large displacement while consuming minimal power. <P>SOLUTION: The MEMS valve device includes a substrate 20 having an aperture 70 formed therein, a substrate electrode 40, and a movable membrane 60 located on the aperture 70 and having an electrode element layer 62 and biasing element layers 64, 66. At least one resiliently compressible dielectric layer 50 is provided to ensure electrical isolation between the substrate electrode 40 and the electrode element layer 62 of the movable membrane 60. In operation, voltage difference is established between the substrate electrode 40 and the electrode element layer 62 of the movable membrane 60 to move the movable membrane 60 relative to the aperture 70 to thereby controllably adjust the portion of the aperture 70 covered with the movable membrane 60. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
