| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for measuring characteristics of a minute object, having increased measuring efficiency.SOLUTION: A minute object characteristic measurement device 800a includes: a plurality of holding members that can hold minute objects, respectively; a driving system that can drive the holding members separately; a cantilever facing a minute object held by any one of the holding members; and a driving unit that can drive the holding members holding minute objects or the cantilever into a direction in which the minute objects held by the holding members approach the cantilever and into a direction in which the minute objects become separate from the cantilever. In that way, a minute object characteristic measurement device with increased measurement accuracy can be obtained.SELECTED DRAWING: Figure 8 |
