PROCESS FOR PREPARING A TIO/GAAS STRUCTURE

摘要

The invention relates to a process for preparing a photosensitive structure of TiOdeposited on a GaAs support. According to the invention, the process consists in depositing a thin TiOcoat on a monocrystalline GaAs substrate using the sol-gel method, followed by a thermal treatment at 800°C, for 2 h; Au-Ge electrodes are deposited on the GaAs face and Au electrodes on the TiOface by vacuum evaporation; the soldering is performed with molten indium on the Au-Ge/GaAs face and with indium wire on the Au/TiOface, in air, at 200...250°C. At the end, the assembly of the sensitive structure is sealed, on a cup-shaped base support TO39, with glass cover.