OPTICAL ELEMENT, OPTICAL SYSTEM AND OPTICAL APPARATUS USING MULTI-LAYER FILM

摘要

An optical element 100 includes a substrate 102, and a multi-layer filter stacked on the substrate. When, of two materials having mutually different refractive indexes, a film formed of a material having a higher refractive index is an H-film and a film formed of a material having a lower refractive index is an M-film, the multi-layer films includes a plurality of H-films and M-films. When one of the H-film and the M-film is a first film and a wavelength of light incident to the multi-layer film is λ(nm), optical thickness of the first film repeats an increase/decrease so that an increase/decrease amount varies, a maximum value of the increase/decrease amount is equal to or more than λ/10, a minimum value of the increase/decrease amount is equal to or less than λ/15, and total film numbers of the H-film and the M-film are from 30 to 1000.

主权项

1. An optical element comprising:
a substrate; and a multi-layer filter stacked on the substrate, and wherein when, of two materials having mutually different refractive indexes, a film formed of a material having a higher refractive index is an H-film and a film formed of a material having a lower refractive index is an M-film, the multi-layer films includes a plurality of H-films and M-films, and wherein when one of the H-film and the M-film is a first film and a wavelength of light incident to the multi-layer film is λ(nm), optical thickness of the first film repeats an increase/decrease so that an increase/decrease amount varies, a maximum value of the increase/decrease amount is equal to or more than λ/10, a minimum value of the increase/decrease amount is equal to or less than λ/15, and total film numbers of the H-film and the M-film are from 30 to 1000.