| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor capable of detecting the size, direction and acceleration of external force, having a simple structure and allowed to be easily manufactured, and to provide a method for manufacturing the dynamic quantity sensor. <P>SOLUTION: The dynamic quantity sensor includes: a substrate; a fixed part arranged on the substrate; a plurality of movable electrodes each of which has an one-end portion supported by the fixed part, is arranged separately from the substrate and includes a movable part; fixed electrodes respectively arranged adjacently to the other ends of the plurality of movable electrodes in a dynamic quantity detection direction; a first terminal electrically connected to the movable electrodes; and a second terminal electrically connected to the fixed electrodes. Each of the plurality of movable electrodes includes a thin film having internal stress, the other end parts of the plurality of movable electrodes are brought into electrically contact with respective opposed fixed electrodes, the other ends of the plurality of movable electrodes are displaced in accordance with applied external force and are electrically non-contact with the fixed electrodes. <P>COPYRIGHT: (C)2012,JPO&INPIT |
