Kontaktlochätzverfahren für eine Flüssigkristallanzeige mit aktiver Matrix

摘要

The invention provides a method for manufacturing an active matrix liquid crystal displaying device having a plurality of thin film transistors (50) using five masks. A plurality of gate electrodes (44) are formed using a first mask. A plurality of etch stoppers (60) are formed over the gate electrodes using a second mask. A plurality of drain electrodes (40) and a plurality of source electrodes (41) are formed using a third mask. A passivation layer (70) including via holes (43) is formed using a fourth mask. A plurality of pixel electrodes (38) are formed using a fifth mask.