发明名称 SPECTROSCOPY SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a spectroscopy whose scope of application is larger than that of a conventional spectroscopy. SOLUTION: In some embodiments, mechanical and/or optical zoom mechanisms may be provided for monochromator systems. For example, movable detector systems allow a detector to be positioned with respect to a dispersive element in order to obtain a first resolution. The detector systems may then allow the detector to be positioned with respect to a dispersive element to obtain a second different resolution. In some embodiments, spectroscopy of a first sample region may be performed using a plurality of excitation wavelengths. Multiple detectors may be positioned to receive light having the plurality of excitation wavelengths. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008046132(A) 申请公布日期 2008.02.28
申请号 JP20070212499 申请日期 2007.08.16
申请人 WAFERMASTERS INC 发明人 YOO WOO SIK
分类号 G01J3/44;G01J3/14;G01J3/18;G01J3/36;G01N21/65 主分类号 G01J3/44
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