METHOD FOR TESTING A TEST SUBSTRATE UNDER DEFINED THERMAL CONDITIONS AND THERMALLY CONDITIONABLE PROBER

摘要

The invention relates to a method and a device for testing a test substrate (1) under defined thermal conditions, the test substrate (1) to be tested being held by a chuck (2) the temperature of which can be adjusted and being adjusted to a defined temperature. The test substrate (1) is positioned relative to test probes (32) by means of at least one positioning device (3, 4, 5, 6, 7, 8) and is contacted by the test probes (32) for the purpose of testing. The invention is characterized in that at least one component of the positioning device (3, 4, 5, 6, 7, 8) which is present in the vicinity of the thermally adjusted test substrate (1) is adjusted to a temperature independent of the temperature of the test substrate (1), using a temperature-adjusting device (20, 27, 28), and this temperature is maintained constant.