| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stage moving/controlling device capable of accurately controlling the moving (position or speed) of a stage on which an object to be processed is placed, as well as a laser annealing device for which the foregoing device is utilized. SOLUTION: The stage moving/controlling device of a laser annealing device 1 is provided with a heat processing chamber 3, a stage 15 for placing an object 2 to be heat processed in this chamber, a driving shaft 19 one end 17 of which is attached to the stage 15 and the other end of which is projecting from the chamber 3, a driving mechanism 20 connected to the projecting end of the driving shaft for the purpose of moving the stage through the shaft, a reflection mirror 40 installed on the stage in the manner that it faces in the moving direction X of the stage, a laser beam transmitting window 39 formed on the wall of the chamber, a laser measuring machine body 37 for measuring the movement of the stage by emitting a laser beam B that enters the chamber through the laser beam transmitting window and by receiving the reflected light from the reflection mirror, and a controller 45 for controlling the driving mechanism based on the measured result by the laser measuring machine body.</p> |
