| 发明名称 |
Transport object levitation unit, transport object levitation apparatus and stage apparatus |
| 摘要 |
A transport object levitation unit includes: a blow-out channel and a suction channel, and the blow-out channel has a portion the channel cross section area of which discontinuously changes.
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| 申请公布号 |
US2008069677(A1) |
申请公布日期 |
2008.03.20 |
| 申请号 |
US20070896408 |
申请日期 |
2007.08.31 |
| 申请人 |
SUMITOMO HEAVY INDUSTRIES, LTD. |
发明人 |
KAWACHI SHUNICHI;FUJIKAWA MASAYUKI |
| 分类号 |
B65G35/00 |
主分类号 |
B65G35/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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