发明名称 SILICON SINGLE CRYSTAL INGOT GROWTH APPARATUS
摘要 Provided is an apparatus for growing silicone single crystal ingot, which includes: a chamber; a crucible provided in the chamber and melting polycrystalline silicone after loading the same; and a plurality of heater parts separated from an outer lateral side of the crucible and surrounding an outer circumferential surface of the crucible. According to the present invention, the apparatus is capable of selectively controlling a temperature of the heater parts.
申请公布号 KR20160084183(A) 申请公布日期 2016.07.13
申请号 KR20150000763 申请日期 2015.01.05
申请人 LG SILTRON INCORPORATED 发明人 KIM, NAM JAE
分类号 C30B15/18;C30B15/20 主分类号 C30B15/18
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