摘要 |
PROBLEM TO BE SOLVED: To reduce smears and to improve shading characteristics. SOLUTION: An imaging area 33 where photodetection portions 12 are arrayed in two dimensions is halved with respect to a horizontal direction (X direction) into a first imaging area 33a and a second imaging area 33b which are symmetrical about a border line 34. In the first and second imaging areas 33a and 33b, a readout gate 14 is disposed outside the photodetection portions 12 symmetrically about the border line 34, and further a vertical transfer path 15 is disposed outside the photodetection portions 12. A transfer electrode is provided nearly right above the vertical transfer path 15 and readout gate 14, and a light shield film is provided covering the transfer electrode and partially having an opening right above the photodetection portions 12. The light shield film has an opening end extended to right above the photodetection portions 12 and has a larger projection width on a channel stop side (outside) than on the side of the readout gate 14 (inside). COPYRIGHT: (C)2009,JPO&INPIT
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