| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of enhancing a temperature rising property and temperature uniformity of a suction support member, and of suppressing bleed-out and volatilization of a silicone resin component in a bonding layer.SOLUTION: An electrostatic chuck 1 comprises: a metal base member 3; a suction support member 2 having a ceramic insulator 20, and a suction electrode 21 and a heater 22 arranged on the ceramic insulator 20, and sucking and supporting a semiconductor wafer (a sucked object) 8; and a bonding layer 4 arranged between the base member 3 and the suction support member 2. The bonding layer 4 contains a matrix resin containing a silicone resin, and a porous filler dispersed in the matrix resin, and has a thermal conductivity of 0.2 W/(m K) or less. Low molecule siloxane contained in the silicone resin exists in pores of the porous filler. |
