INSPECTION METHOD AND INSPECTION DEVICE

摘要

An inspection device of an embodiment comprises: a lighting part which emits illumination light to a target sample having defects; an imaging part which acquires an optical image of the illumination light reflected by the target sample or penetrating the target sample; a first memory part which stores the defect correction method information of defects; a comparison part which compares an optical image and a reference image based on the defect correction method information; and a first determination part which determines whether the correction of defects is suitable based on the defect correction method information and the comparison result in the comparison part. As such, the excessive detection of defects is able to be prevented.