| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing aluminum halide gas having a low aluminum monohalide gas content.SOLUTION: In a method for producing aluminum halide gas by bringing halogen-based gas and aluminum into contact with each other, the halogen-based gas and first carrier gas are brought into contact with the aluminum to produce the aluminum halide gas, and second carrier gas fed so as not to contact to the aluminum is mixed with the aluminum halide gas and first carrier gas such that the aluminum halide gas is discharged from a downstream side of a reactor to out of the reactor. |
