| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent cracks from being generated as much as possible so as to enhance reliability, in a piezoelectric crystal layer 5 of a diaphragm-type piezoelectric element provided with an upper electrode layer 7 which is formed on the piezoelectric crystal layer 5 located at the opening 1a inner side of an upper electrode body 7a, and extends toward an opening 1a outside from a part of the periphery of the upper electrode body 7a, and which is patternized so that the upper electrode layer includes wiring 7b striding over the opening 1a edge top, while including a diaphragm layer 3 formed on substrate 1 so as to cover the opening 1a, a lower electrode layer 4 formed on the diaphragm layer 3, and the piezoelectric crystal layer 5 formed on the lower electrode layer 4. <P>SOLUTION: A low dielectric constant layer 6 is so formed that, in a portion on an opening 1a edge where the wiring 7b strides the opening 1a edge at least either between the piezoelectric crystal layer 5 and the lower electrode layer 4, or between the piezoelectric crystal layer 5 and the upper electrode layer 7. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
