发明名称 |
Bouncing Mode Operated Scanning Micro-Mirror |
摘要 |
A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.
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申请公布号 |
US2007216986(A1) |
申请公布日期 |
2007.09.20 |
申请号 |
US20070627987 |
申请日期 |
2007.01.29 |
申请人 |
TERAOP DISPLAYS LTD. |
发明人 |
HUBER AVIGDOR;MEDINA MOSHE;KRYLOV SLAVA |
分类号 |
G02B26/00;G02B26/08;G02F1/03;G02F1/07 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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