METHOD FOR MANUFACTURING MICROFLUID FLOW CONTROL CHIP AND METHOD FOR CONTROLLING MICROFLUID WIDTH IN A MICROCHANNEL USING AIR BOUNDARIES

摘要

To provide a microfluid flow control chip capable of controlling width of microfluid in microchannel using air boundaries, a microfluid width control method capable of controlling width of microfluid in microchannel using air boundaries, and a method for applying microfluid into coefficient or alignment of cells by controlling width of microfluid. The method for manufacturing microfluid flow control chip comprises a process of depositing an aluminum layer on a silicon substrate(2); a process of fabricating a microheater(6) by patterning the aluminum layer; a process of a SOG coating layer(8) for electrically insulating the fabricated microheater; a process of patterning the SOG coating layer; a process of forming a photoresist coating layer on the silicon substrate to fabricate a mold for microchannel(12); a process of patterning the photoresist coating layer; a process of forming a microchannel in PDMS(polydimethyl siloxane)(16) to fabricate the microchannel by the fabricated mold; a process of stripping the fabricated PDMS from the mold; and a process of forming the microchannel between the PDMS and the silicon substrate by bonding the PDMS and the silicon substrate to each other. The method for controlling microfluid width in microchannel using air boundaries(14) comprises the processes of: generating air by heating water by a microheater in microchannel of the fabricated microfluid flow control chip; producing air boundaries by the generated air; and controlling width of microfluid by controlling pressure in the air boundaries.