发明名称 Microcolumnar lanthanum halide scintillator, devices and methods
摘要 Evaporation methods and structures for depositing a microcolumnar lanthanum halide scintillator film on a surface of a substrate. A radiation detection device including a doped lanthanum halide microcolumnar scintillator formed on a substrate.
申请公布号 US9090967(B1) 申请公布日期 2015.07.28
申请号 US201213460626 申请日期 2012.04.30
申请人 Radiation Monitoring Devices, Inc. 发明人 Nagarkar Vivek;Gaysinskiy Valeriy
分类号 C23C14/24;G01T1/202 主分类号 C23C14/24
代理机构 Wilson Sonsini Goodrich & Rosati 代理人 Wilson Sonsini Goodrich & Rosati
主权项 1. A method of forming a microcolumnar lanthanum halide scintillator film on a surface of a substrate, the method comprising: providing a hot wall evaporation apparatus comprising an evaporation chamber having one or more chamber walls disposed between a positioned substrate and a scintillator source material; and depositing a microcolumnar lanthanum halide scintillator film on a surface of the positioned substrate by a process comprising applying heat to the evaporation chamber so as to vaporize scintillator source material for film deposition, wherein applying heat comprises maintaining a temperature relationship of Twall>Tsource>Tsubstrate for at least a portion of the deposition process, and wherein more than 90% of the deposited scintillator source material is deposited on the substrate surface.
地址 Watertown MA US