发明名称 |
Microcolumnar lanthanum halide scintillator, devices and methods |
摘要 |
Evaporation methods and structures for depositing a microcolumnar lanthanum halide scintillator film on a surface of a substrate. A radiation detection device including a doped lanthanum halide microcolumnar scintillator formed on a substrate. |
申请公布号 |
US9090967(B1) |
申请公布日期 |
2015.07.28 |
申请号 |
US201213460626 |
申请日期 |
2012.04.30 |
申请人 |
Radiation Monitoring Devices, Inc. |
发明人 |
Nagarkar Vivek;Gaysinskiy Valeriy |
分类号 |
C23C14/24;G01T1/202 |
主分类号 |
C23C14/24 |
代理机构 |
Wilson Sonsini Goodrich & Rosati |
代理人 |
Wilson Sonsini Goodrich & Rosati |
主权项 |
1. A method of forming a microcolumnar lanthanum halide scintillator film on a surface of a substrate, the method comprising:
providing a hot wall evaporation apparatus comprising an evaporation chamber having one or more chamber walls disposed between a positioned substrate and a scintillator source material; and depositing a microcolumnar lanthanum halide scintillator film on a surface of the positioned substrate by a process comprising applying heat to the evaporation chamber so as to vaporize scintillator source material for film deposition, wherein applying heat comprises maintaining a temperature relationship of Twall>Tsource>Tsubstrate for at least a portion of the deposition process, and wherein more than 90% of the deposited scintillator source material is deposited on the substrate surface. |
地址 |
Watertown MA US |