| 发明名称 |
MICRO PHOTOLUMINESCENCE IMAGING WITH OPTICAL FILTERING |
| 摘要 |
A method that includes: illuminating a wafer with excitation light having a wavelength and intensity sufficient to induce photoluminescence in the wafer; filtering photoluminescence emitted from a portion of the wafer in response to the illumination; directing the filtered photoluminescence onto a detector to image the portion of the wafer on the detector with a spatial resolution of 1 μm×1 μm or smaller; and identifying one or more crystallographic defects in the wafer based on the detected filtered photoluminescence. |
| 申请公布号 |
US2016327485(A1) |
申请公布日期 |
2016.11.10 |
| 申请号 |
US201514879522 |
申请日期 |
2015.10.09 |
| 申请人 |
Semilab SDI LLC |
发明人 |
Kiss Zoltan Tamas;Dudas Laszlo;Nadudvari Gyorgy;Laurent Nicolas;Jastrzebski Lubomir L. |
| 分类号 |
G01N21/64;G01N21/95 |
主分类号 |
G01N21/64 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method comprising:
illuminating a wafer with excitation light having a wavelength and intensity sufficient to induce photoluminescence in the wafer; filtering photoluminescence emitted from a portion of the wafer in response to the illumination; directing the filtered photoluminescence onto a detector to image the portion of the wafer on the detector with a spatial resolution of 1 μm×1 μm or smaller; and identifying one or more crystallographic defects in the wafer based on the detected filtered photoluminescence. |
| 地址 |
Tampa FL US |
