发明名称 |
Purge gas unit and purge gas supply integrated unit |
摘要 |
To provide a purge gas unit and a purge gas supply integrated unit having a smaller foot space, the purge gas unit comprises an input block for input of purge gas into the purge gas unit, the input block including a purge passage formed through the input block to provide an opening in a side surface of the input block and an input passage formed branching off from the purge passage; an output block for output of the purge gas from the purge gas unit; a communication block connected to the input block and the output block to provide communication between the input block and the output block.
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申请公布号 |
US2008069702(A1) |
申请公布日期 |
2008.03.20 |
申请号 |
US20070822387 |
申请日期 |
2007.07.05 |
申请人 |
CKD CORPORATION;TOKYO ELECTRON LIMITED |
发明人 |
OKABE TSUNEYUKI;MORI YOJI;INAGAKI TAKEYA;SUGINO AKIHITO |
分类号 |
E21B43/12 |
主分类号 |
E21B43/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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