Method of measuring a three-dimensional shape

摘要

In order to measure a three-dimensional shape, feature information is read from a database. A board is transferred to a measurement position. A measurement head is transferred to an inspection area of the board. Light of a first lighting device for three-dimensional measurement and light of a second lighting device for two-dimensional measurement is illuminated onto the inspection area to photograph a first reflection image and a second reflection image that are reflected from the inspection area. The inspection area is realigned by comparing the feature information with at least one of the photographed first and second reflection images to inspect distortion of the inspection area. The realigned inspection area is inspected. Thus, the three-dimensional shape may be precisely measured.

主权项

1. A three-dimensional shape measuring apparatus comprising:
a stage transferring a target board to a measurement position; at least one projector illuminating pattern light onto an inspection area of the target board; a two-dimensional lighting section illuminating light for two-dimensional measurement onto the inspection area of the target board; a camera section photographing a pattern image and a two-dimensional image reflected from the target board; and a control section reading feature information of the inspection area from a database, wherein the control section realigns the inspection area by comparing the feature information with at least one of the photographed pattern image and the photographed two-dimensional image to inspect distortion of the inspection area.