发明名称 GALLIUM NITRIDE SEMICONDUCTOR DEVICE ON SOI AND PROCESS FOR MAKING SAME
摘要 <p>Methods and apparatus for producing a gallium nitride semiconductor on insulator structure include: bonding a single crystal silicon layer to a transparent substrate; and growing a single crystal gallium nitride layer on the single crystal silicon layer.</p>
申请公布号 WO2009051650(A1) 申请公布日期 2009.04.23
申请号 WO2008US11578 申请日期 2008.10.08
申请人 CORNING INCORPORATED;BHAT, RAJARAM;GADKAREE, KISHOR P;NAPIERALA, JEROME;PINCKNEY, LINDA R;ZAH, CHUNG-EN 发明人 BHAT, RAJARAM;GADKAREE, KISHOR P;NAPIERALA, JEROME;PINCKNEY, LINDA R;ZAH, CHUNG-EN
分类号 H01L21/20;H01L33/00 主分类号 H01L21/20
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