摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of ceramic powders having a fine crystal particle diameter and an excellent fracture property. <P>SOLUTION: The manufacturing method of the ceramic powder starts a reaction heating and temperature-rising a metal powder in a reactive gas atmosphere. The manufacturing method is characterized in that the reaction gas is changed over to the gas atmosphere inactive to the metal powder in the state that the temperature inside a reaction chamber in which the metal powder is held is not more than an activation temperature, the temperature is further raised, the heating is stopped at the stage when the temperature inside the reaction chamber surpasses the activation temperature, and in that the inside of the reaction chamber is turned to the reactive gas atmosphere in the state that the heat inside the reaction chamber can be radiated outside. <P>COPYRIGHT: (C)2008,JPO&INPIT |