发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, TESTING METHOD FOR THE SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, AND PROBE CARD USED FOR BURN-IN STRESS AND D/S
摘要 PROBLEM TO BE SOLVED: To apply optimal burn-in stress to a sample. SOLUTION: A semiconductor integrated circuit device 50 is provided with a burn-in counter 1, a control unit 2, and a circuit 3 to be tested. The burn-in counter 1 is provided for grasping the burn-in stress applied to the circuit 3 to be tested as a semiconductor storage device. The burn-in counter 1 grasps the burn-in stress (the temperature applied and the voltage applied) applied to the circuit 3 to be tested, counts up (monitors) the burn-in stress, and outputs the burn-in stress information corresponding to the applied temperature, the applied voltage, and a burn-in stress time to the outside. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009059965(A) 申请公布日期 2009.03.19
申请号 JP20070227002 申请日期 2007.08.31
申请人 TOSHIBA CORP 发明人 OHASHI MASANOBU;KANEKO YOSHIO
分类号 H01L21/822;G01R31/26;G01R31/28;H01L21/66;H01L27/04 主分类号 H01L21/822
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