| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an image correcting method with a reduction in setting parameter which represents the unification of the shift (alignment) in a sub-pixel unit and image correction. <P>SOLUTION: In the image correcting method, the relation of an inspection reference pattern image with a pattern image to be inspected is identified to construct a numerical formula model absorbing (fitting) the pixel shift or expansion and contraction, undulation noise and sensing noise of an image and an estimate model image is formed by the simulation of the numerical formula model. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
