| 摘要 |
<p>The invention relates to a method for producing an electric solar cell contact structure on a substrate, said method comprising the following steps: provision of a plurality of substrates (3); production of at least one electrically conductive solar cell contact structure (12) on said substrate (3) by: generation of a metal vapour (21) in a metal vapour region, displacement of the substrates (3) in a row in a substrate displacement direction (A) through the metal vapour region; arrangement of one of the substrates (3) in the metal vapour region with some sections lying opposite the mask (4) that screens off the metal vapour (21), said mask having an opening (49) that defines the solar cell contact structure (12); displacement of the mask (4) in a mask displacement direction (B), at least some sections of which pass through the metal vapour region, said substrate displacement direction (A) and the mask displacement direction (B) running substantially parallel and the substrates (3) and mask (4) being displaced at different speeds. The invention also relates to a device for producing electric solar cell contact structures on a substrate.</p> |
