MEASUREMENT APPARATUS, CALCULATION METHOD, SYSTEM, AND METHOD OF MANUFACTURING ARTICLE

摘要

The present invention provides a measurement apparatus for measuring a shape of an object to be measured, including a processing unit configured to obtain information on the shape of the object to be measured based on an image obtained by imaging the object to be measured onto which pattern light alternately including a bright portion and a dark portion along a first direction is projected, wherein the processing unit obtains a plurality of first signals different from each other and indicating a light intensity distribution in a second direction intersecting the first direction, from a region of the image, which corresponds to the dark portion.

主权项

1. A measurement apparatus for measuring a shape of an object to be measured, comprising:
a processing unit configured to obtain information on the shape of the object to be measured based on an image obtained by imaging the object to be measured onto which pattern light alternately including a bright portion and a dark portion along a first direction is projected, wherein the processing unit obtains a plurality of first signals different from each other and indicating a light intensity distribution in a second direction intersecting the first direction, from a region of the image, which corresponds to the dark portion, obtains evaluation values indicating evaluation of a plurality of corrected signals obtained by correcting, by using the plurality of first signals, a second signal which is obtained from a region of the image, which corresponds to the bright portion, and represents a light intensity distribution in the second direction, and obtains the information by using a corrected signal having the evaluation value falling within an allowable range.