发明名称 |
SOI-BASED OPTO-ELECTRONIC DEVICE INCLUDING CORRUGATED ACTIVE REGION |
摘要 |
The surface silicon layer (SOI layer) of an SOI-based optical modulator is processed to exhibit a corrugated surface along the direction of optical signal propagation. The required dielectric layer (i.e., relatively thin "gate oxide") is formed over the corrugated structure in a manner that preserves the corrugated topology. A second silicon layer, required to form the modulator structure, is then formed over the gate oxide in a manner that follows the corrugated topology, where the overlapping portion of the corrugated SOI layer, gate oxide and second silicon layer defines the active region of the modulator. The utilization of the corrugated active region increases the area over which optical field intensity will overlap with the free carrier modulation region, improving the modulator's efficiency.
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申请公布号 |
WO2007146235(A3) |
申请公布日期 |
2008.04.24 |
申请号 |
WO2007US13694 |
申请日期 |
2007.06.11 |
申请人 |
SIOPTICAL. INC.;MONTGOMERY, ROBERT, KEITH;PATEL, VIPULKUMAR |
发明人 |
MONTGOMERY, ROBERT, KEITH;PATEL, VIPULKUMAR |
分类号 |
G02F1/025 |
主分类号 |
G02F1/025 |
代理机构 |
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