| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor tester capable of accurately controlling the junction temperature of a plurality of semiconductor devices to be tested.SOLUTION: A semiconductor tester includes: a burn-in board 3 having a plurality of sockets 5, where semiconductor devices 6 are mounted; boxes 4 and 14 that include at least blower fans 7a to 7d arranged toward openings 4b and 14b which are formed at side parts and that individually cover the sockets 5; a thermostatic chamber 2 that houses the burn-in board 3; a temperature sensor 5c that individually measures the temperatures of the plurality of semiconductor devices 6; and a control unit 10 that performs comparison for the temperatures detected by the temperature sensor 5c and blows air to any of the semiconductor devices 6 that do not reach a target temperature by rotating the blower fans 7a to 7d so as to exchange heat. |
