| 摘要 |
PROBLEM TO BE SOLVED: To reliably hold a glass substrate at a prescribed position by regulating the travel of the floated glass substrate. SOLUTION: A through-hole 26 is provided on a unit body 20 of a suction conveyance unit 17 for sucking, holding, and conveying the glass substrate W; and a sucking/holding mechanism 25 is provided at the through-hole 26. The sucking/holding mechanism 25 has a cylindrical elastic member 31 connected to a compressed air supply 30, and a suction pad 33 is fitted to the upper end 32 of the elastic member 31. In the suction pad 33, a suction hole 36 communicating with the elastic member 31 is formed. COPYRIGHT: (C)2007,JPO&INPIT
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