METAL POLLUTION REMOVAL METHOD AND METAL POLLUTION REMOVAL APPARATUS

摘要

PROBLEM TO BE SOLVED: To efficiently remove metal pollution of a fluorine-based resin constituting a chemical liquid supply line in a short period of time.SOLUTION: A metal pollution removal method for removing metal pollution existing in the inner wall of a fluorine-based resin constituting a chemical liquid supply line 25 for supplying a chemical liquid to a body to be treated includes: supplying a cleaning substance having reactivity to metal constituting the metal pollution to the chemical liquid supply line 25 in a state where a part or all of the cleaning substance is gaseous; and making the gaseous cleaning substance act on the metal pollution existing in the inner wall of the fluorine-based resin constituting the chemical liquid supply line 25 to thereby remove the metal pollution.SELECTED DRAWING: Figure 1