发明名称 |
SCANNING PROBE MICROSCOPE AND CONTROL METHOD THEREOF |
摘要 |
A scanning probe microscope includes a cantilever having a probe at a free end thereof; a scanner to three-dimensionally relatively move the probe and a sample; a vibrator to vibrate the cantilever based on a vibrating signal; a displacement detector to detect a displacement of the cantilever and to output a displacement signal indicating the displacement; and a phase difference information detecting section to generate a phase signal including information of a phase difference between the vibrating signal and the displacement signal. The phase difference information detecting section includes a phase regulating portion to provide, to the phase difference, a phase offset to cancel an initial phase difference present in a state in which the probe is not in contact with the sample. |
申请公布号 |
US2016216293(A1) |
申请公布日期 |
2016.07.28 |
申请号 |
US201615092027 |
申请日期 |
2016.04.06 |
申请人 |
OLYMPUS CORPORATION |
发明人 |
SAKAI Nobuaki |
分类号 |
G01Q10/00 |
主分类号 |
G01Q10/00 |
代理机构 |
|
代理人 |
|
主权项 |
1. A scanning probe microscope comprising:
a cantilever having a probe at a free end thereof; a scanner to three-dimensionally relatively move the probe and a sample; a vibrator to vibrate the cantilever based on a vibrating signal; a displacement detector to detect a displacement of the cantilever and to output a displacement signal indicating the displacement; and a phase difference information detecting section to generate a phase signal including information of a phase difference between the vibrating signal and the displacement signal, wherein the phase difference information detecting section includes a phase regulating portion to provide, to the phase difference, a phase offset to cancel an initial phase difference present in a state in which the probe is not in contact with the sample. |
地址 |
Tokyo JP |