| 摘要 |
The utility model relates to a measurement device for be used for measuring specific gas component, measuring device realizes through several macroscopical mechanical motion parts. Consequently, provide a measuring device, it is equipped with - broadband light source, and it is sent light by the design with being used for the modulation, - measure the volume, gas wherein awaits measuring, - first light deflection unit, it has at least one MEMS speculum to to be bare in two light paths of deflecting alternately, and one of them first route is constructed into the measurement route and is included first filter element, and wherein another second route is constructed into the reference route and is included the second filter element, - optical element, it will be measured the route and refer to the route and cause same light path again, - light detector, and - aassessment and the control unit, it is used for controlling light source and light deflection unit and is used for evaluateing the luminous intensity that detects to thereby measurement gas component. |
