CIRCULATION COOLING AND HEATING DEVICE

摘要

A circulating cooling/heating device configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment includes: a heat exchanger configured to perform heat exchange between the circulating fluid and a cooling water; a heater configured to heat the circulating fluid; a pump configured to circulate the circulating fluid between the circulating cooling/heating device and the chamber; a cooling water circulation block through which the cooling water passes; and a pressure sensor serving as a pressure detecting unit configured to detect a pressure of the cooled or heated circulating fluid, the pressure sensor being attached to the cooling water circulation block.

主权项

1. A circulating cooling/heating device configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment, the circulating cooling/heating device comprising:
a heat exchanger configured to perform heat exchange between the circulating fluid and a cooling water; a heater configured to heat the circulating fluid; a pump configured to circulate the circulating fluid between the circulating cooling/heating device and the chamber; a cooling water circulation block through which the cooling water passes; and a pressure detecting unit configured to detect a pressure of the cooled or heated circulating fluid, the pressure detecting unit being attached to the cooling water circulation block.