Wet etching of zinc tin oxide thin films

摘要

A method of wet etching semiconductor zinc tin oxide includes submerging a semiconductor zinc tin oxide film in a bath solution. The film is partially covered with a pattern of protective material, and the bath solution etches semiconductor zinc tin oxide film not covered by the protective material. A system for wet etching semiconductor zinc tin oxide includes a bath containing a bath solution. The bath solution is effective to wet etch the semiconductor zinc tin oxide.