发明名称 METHOD FOR FORMING BUMP AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE TO FORM BUMP BY SIMPLE PROCESS
摘要 PURPOSE: A method for forming a bump is provided to form a bump by a simple process by forming an opening in an insulation layer while using a through hole in a resist layer and by forming a metal layer coupled to a pad. CONSTITUTION: The first insulation layer has the first opening exposing the first part of a pad(12). The second insulation layer is formed on the first insulation layer and the first part of the pad. A resist layer(20) has a through hole(22) that two-dimensionally overlaps at least a part of the first opening. The second opening exposes at least a part of the first part through the through hole in the second insulation layer. A metal layer(30,32) coupled to the pad exposed by the second opening is formed by using the through hole.
申请公布号 KR20040081732(A) 申请公布日期 2004.09.22
申请号 KR20040070245 申请日期 2004.09.03
申请人 SEIKO EPSON CORPORATION 发明人 SAKURAI KAZUNORI;OTA TSUTOMU;MATSUSHIMA FUMIAKI;MAKABE AKIRA
分类号 H01L21/60;H01L23/31;H01L23/485 主分类号 H01L21/60
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