发明名称 |
METHOD FOR FORMING BUMP AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE TO FORM BUMP BY SIMPLE PROCESS |
摘要 |
PURPOSE: A method for forming a bump is provided to form a bump by a simple process by forming an opening in an insulation layer while using a through hole in a resist layer and by forming a metal layer coupled to a pad. CONSTITUTION: The first insulation layer has the first opening exposing the first part of a pad(12). The second insulation layer is formed on the first insulation layer and the first part of the pad. A resist layer(20) has a through hole(22) that two-dimensionally overlaps at least a part of the first opening. The second opening exposes at least a part of the first part through the through hole in the second insulation layer. A metal layer(30,32) coupled to the pad exposed by the second opening is formed by using the through hole. |
申请公布号 |
KR20040081732(A) |
申请公布日期 |
2004.09.22 |
申请号 |
KR20040070245 |
申请日期 |
2004.09.03 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
SAKURAI KAZUNORI;OTA TSUTOMU;MATSUSHIMA FUMIAKI;MAKABE AKIRA |
分类号 |
H01L21/60;H01L23/31;H01L23/485 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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