| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lithographic method and a lithographic apparatus which can shorten the updating time of a spatial optical modulation element. <P>SOLUTION: Only 192 rows from among 768 rows, arranged along the scanning direction of a DMD 50, are used; and furthermore, the 192 rows are divided into 5 regions (region 1 to 5), a control signal is sequentially transmitted from the region 1 to the region 5, and the resetting of the micro-mirrors is sequentially performed, starting from the region where the transmission of control signal has been finished. <P>COPYRIGHT: (C)2008,JPO&INPIT |
